Application of focused ion beam micromachining: a review

Rahman Azmil, Nur Atiqah and Jaafar, Israd Hakim and Ali, Mohammad Yeakub and Asfana, Banu (2012) Application of focused ion beam micromachining: a review. Advanced Materials Research, 576. pp. 507-510. ISSN 1022-6680

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Abstract

Fabrication of micro and nanoscale components are in high demand for various applications in diversified fields that include automotive, electronics, communication and medicine. Focused ion beam (FIB) machining is one of the techniques for microfabrication of micro devices. This paper presents a review of FIB machining technology that include its parameter, responses, its important component systems, as well as the fundamentals of imaging, milling (etching) and deposition techniques. The application of FIB in micromachining is also presented.

Item Type:	Article (Journal)
Additional Information:	3967/27010
Uncontrolled Keywords:	FIB, Focused Ion Beam, Micromachining, Micromilling, Nanomachining, Sputtering
Subjects:	T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	21 Nov 2012 15:05
Last Modified:	22 Oct 2015 07:09
URI:	http://irep.iium.edu.my/id/eprint/27010

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