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Hysteresis compensation for piezoelectric tube scanner in atomic force microscopy

Othman, Yahya Sheriff and Mahmood, Iskandar Al-Thani and Alang Md Rashid, Nahrul Khair (2012) Hysteresis compensation for piezoelectric tube scanner in atomic force microscopy. In: 2012 International Conference on Enabling Science and Nanotechnology (ESciNano), 5-7 January 2012, Persada Johor International Convention Center, Johor Bharu.

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In this paper, a radial basis function neural network (RBFNN) is designed and used for such purpose. The network is used in conjunction with a self-tuning PID controller. The differential equation of Jenkine element is adopted for hysteresis modeling. The simulation results show that the proposed controller improves the system performance better than open loop system and direct closed loop system by minimizing the effect of hysteresis.

Item Type: Conference or Workshop Item (Full Paper)
Additional Information: 3614/25831 (Print ISBN: 9781457707995, DOI: 10.1109/ESciNano.2012.6149633)
Uncontrolled Keywords: RBFNN;atomic force microscopy;hysteresis compensation;hysteresis modeling;piezoelectric tube scanner;radial basis function neural network;self-tuning PID controller;atomic force microscopy;differential equations;piezoelectric devices;radial basis function networks;three-term control;
Subjects: Q Science > Q Science (General)
T Technology > TJ Mechanical engineering and machinery > TJ212 Control engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): Kulliyyah of Engineering > Department of Mechatronics Engineering
Depositing User: Dr. Iskandar Al-Thani bin Mahmood
Date Deposited: 19 Oct 2012 11:13
Last Modified: 19 Oct 2012 11:13
URI: http://irep.iium.edu.my/id/eprint/25831

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