Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon

Amin, A. K. M. Nurul and Patwari, Muhammed Anayet Ullah and M., Dali and M.I., Musa (2010) Development of a cost effective technique to eliminate conventional finishing operation applying high speed end milling of silicon. In: IIUM Research, Innovation & Invention Exhibition (IRIIE 2010), 26 - 27 January 2010, Kuala Lumpur.

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Abstract

Silicon has been widely used in different branches of industrial engineering. Most application of silicon is in computer parts or hardware especially for the production of integrated circuit (IC) chips. Machining of silicon is a big challenge and expensive affair because of it inherent brittleness which is a major limitation as the process of removing the material can generate subsurface damage. Silicon is conventionally finished using grinding followed by polishing and lapping to achieve required surface finish and surface integrity...

Item Type:	Conference or Workshop Item (Poster)
Additional Information:	2872/23056
Uncontrolled Keywords:	silicon
Subjects:	T Technology > TP Chemical technology
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Dr. A.K.M. Nurul Amin
Date Deposited:	18 Jun 2013 12:27
Last Modified:	18 Jun 2013 12:28
URI:	http://irep.iium.edu.my/id/eprint/23056

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