Investigation of microholes produced by focused ion beam micromachining

Mohd Fuad, Nurul Hajar and Ali, Mohammad Yeakub (2011) Investigation of microholes produced by focused ion beam micromachining. Advanced Materials Research, 264. pp. 1346-1351. ISSN 1022-6680

PDF (Investigation of Microholes ) - Published Version Restricted to Repository staff only Download (278kB) | Request a copy

Abstract

This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole’s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio.

Item Type:	Article (Journal)
Additional Information:	4751/2279
Uncontrolled Keywords:	Focused ion beam (FIB), micromachining, microhole, taper angle, aspect ratio
Subjects:	T Technology > TJ Mechanical engineering and machinery T Technology > TS Manufactures
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	16 Sep 2011 15:01
Last Modified:	27 Jun 2013 16:22
URI:	http://irep.iium.edu.my/id/eprint/2279

Actions (login required)

View Item