Trimming of atomic force microscope probe tip by ion milling

Ali, Mohammad Yeakub and Lim, B.H. (2011) Trimming of atomic force microscope probe tip by ion milling. In: Mechatronics book series: Selected papers from ICOM'01, ICOM'05 and ICOM'08. IIUM Press, Kuala Lumpur, pp. 381-385. ISBN 9789670225685

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Item Type:	Book Chapter
Additional Information:	4751/17714
Uncontrolled Keywords:	MEMS and materials
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering
Depositing User:	Prof. Ir. Dr. Mohammad Yeakub Ali
Date Deposited:	27 Jul 2012 15:02
Last Modified:	27 Jul 2012 15:03
URI:	http://irep.iium.edu.my/id/eprint/17714

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