Design and modelling of an impedance-based MEMS biosensor

Jamil, Nadira and Nordin, Anis Nurashikin and Voiculescu, Ioana (2011) Design and modelling of an impedance-based MEMS biosensor. In: Micro and Nanoelectronics (RSM), 2011 IEEE Regional Symposium on, 28-30 Sept., 2011, Kota Kinabalu.

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Abstract

This paper present the preliminary design of a micro-electromechanical system (MEMS) surface acoustic wave (SAW) resonator as a biosensor using COMSOL. The biosensor consists of a SAW resonator which utilizes mechanical acoustic waves as its sensing mechanism. The preliminary study was performed to verify the functionality and obtain the optimal design parameters for detection of biological cells. Placement of the cells at the centre of the device will load the acoustic waves, resulting in a damped and slower electrical signal. Our design aims to defeat limitations of the current biosensor in terms of cost, size and most important the speed of analysis. Impedance-based MEMS biosensor has the ability to monitor the cell response to electricity flow. A two dimensional finite element model (FEM) was created using COMSOL Multiphysics 3.5a to observe the change in impedance of the device model.

Item Type:	Conference or Workshop Item (Full Paper)
Uncontrolled Keywords:	Biosensor, surface acoustic wave, resonator, DF-1 animal cell, COMSOL
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr. Anis Nurashikin Nordin
Date Deposited:	20 Jan 2012 13:36
Last Modified:	20 Jan 2012 13:36
URI:	http://irep.iium.edu.my/id/eprint/15123

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