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Enhancement of quality factor in ST-cut quartz surface acoustic wave devices by using different numbers of IDTs and wavelengths for gas sensing

Md Ralib @ Md Raghib, Aliza 'Aini and Mohamad Razali, Nur Fatin and Chatras, Matthieu and Nordin, Anis Nurashikin and Abdul Rahman, Farah Diyana and Pothier, Arnaud and Passerieux, Damien and Guines, Cyril (2023) Enhancement of quality factor in ST-cut quartz surface acoustic wave devices by using different numbers of IDTs and wavelengths for gas sensing. In: 2023 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 22nd - 25th May 2023, Kuala Lumpur.

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A robust sensing mechanism requires a high sensitivity, fast response, and good fabrication compatibility. A surface acoustic wave (SAW) device possesses such properties, which make it suitable for gas sensing. This paper reported on the design, fabrication, characterization and measurement of a two-port SAW device built on an ST-cut quartz piezoelectric substrate. In order to develop a reliable SAW device, some performance parameters should be considered, such as the quality factor and electromechanical coupling coefficient. There are several possible ways to increase the quality factor of a SAW device such as by varying the number of interdigitated electrode (IDT) pairs as well as by using different IDT wavelengths. The devices were fabricated using three different numbers of IDTs (N=24,48 , and 72) and two different IDT wavelengths (λ=20 μm and 80 μm) . The calculated quality factor, Q, confirmed that increasing the number of IDTs and reducing the value of the IDT wavelength would lead to a higher quality factor. The optimized SAW device with 72 IDTs and an IDT wavelength of 20 μm showed the highest quality factor of 306.58 at a resonance frequency of 248.33 MHz. The results of this study suggest that the ST-cut quartz SAW device with a high number of IDTs and small wavelength can be a better candidate for a surface acoustic wave device for sensing applications such as gas sensing.

Item Type: Conference or Workshop Item (Plenary Papers)
Uncontrolled Keywords: Surface acoustic wave, quartz substrate, interdigitated electrode, wavelength, quality factor
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices > TK7885 Computer engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): Kulliyyah of Engineering
Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User: Aliza Aini Md Ralib
Date Deposited: 24 Jul 2023 10:04
Last Modified: 24 Jul 2023 10:07
URI: http://irep.iium.edu.my/id/eprint/105681

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