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Ab Rahim, Rosminazuin and Bais, Badariah and Yeop Majlis, Burhanuddin and Sugandi, Gandi (2013) ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon. Microsystem Technologies, 19 (6). pp. 905-914. ISSN 0946-7076 (Print), 1432-1858 (Online)