Mechanical behavior of an electrostatically actuated micropump

Faris, Waleed Fekry and Abdel-Rahman, Eihab M. and Nayfeh, Ali H. (2002) Mechanical behavior of an electrostatically actuated micropump. In: 43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference, 22nd-25th April 2002, Denver, Colorado.

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Abstract

We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the equilibrium position is also solved numerically for the natural frequencies and mode shapes. The results generated by our model are in good qualitative agreement with reported results for the free vibration of straight annular plates. Moreover, the relation between the maximum deflection and the intensity of the electrostatic potential is in qualitative agreement with the experimental results for micropumps with a square actuating member. The model predicts the deflection accurately for any voltage up to the pull-in voltage.

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4694/49864 (eISBN: 978-1-62410-117-5)
Uncontrolled Keywords:	Micropump dynamics, electrostatic actuation, annular plates
Subjects:	T Technology > T Technology (General) T Technology > T Technology (General) > T351 Mechanical drawing. Engineering graphics T Technology > TJ Mechanical engineering and machinery T Technology > TJ Mechanical engineering and machinery > TJ181 Mechanical movements T Technology > TJ Mechanical engineering and machinery > TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General)
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering
Depositing User:	Prof.Dr. Waleed Fekry Faris
Date Deposited:	15 Apr 2016 15:39
Last Modified:	15 Apr 2016 15:39
URI:	http://irep.iium.edu.my/id/eprint/49864

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