Performance analysis of zinc oxide piezoelectric MEMS energy harvester

Jamain, Umi Milhana and Ibrahim, Nur Hidayah and Ab Rahim, Rosminazuin (2014) Performance analysis of zinc oxide piezoelectric MEMS energy harvester. In: IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE, 27th-29th Aug 2014, Kuala Lumpur.

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Abstract

This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Additional Information:	4269/39598
Uncontrolled Keywords:	COMSOL Multi Physics; MEMS; piezoelectric energy harvester; ZnO
Subjects:	T Technology > T Technology (General)
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Rosminazuin Ab Rahim
Date Deposited:	10 Dec 2014 09:10
Last Modified:	26 Sep 2017 16:49
URI:	http://irep.iium.edu.my/id/eprint/39598

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