Novel mems biosensor with integmted impedance and mass-sensing capabilities

Nordin, Anis Nurashikin and Ibrahimy, Muhammad Ibn and Mel, Maizirwan and Voiculescu, Ioana (2011) Novel mems biosensor with integmted impedance and mass-sensing capabilities. MY145190-A.

Preview

PDF Download (1MB) | Preview

Abstract

A BIOSENSOR DEVICE (1) PROVIDING AN ANALYSE PLATFORM FOR DETECNNG CELL GROWTH, COMPRISING OFAN ALUMINIUM NITRIDE (AIN) BASE (2), A SHEAR HORIZONTAL-SURFACE ACOUSTIC WAVE (SH-SAW) RESONATOR INCLUDING AN INPUT TMNSDUCER (4) AND AN OUTPUT TRA.NSDUCER (5) SYMMETRICALLY POSmONED ON THE ALUMTNUM NTTRIOE (ArN)BASE (2), A COUNTER ELECTRODE (6) POSMONED PAMLLEL TO WORKING ELECTRODES (7) ON THE ALUMINUM NITRIDE (ArN) BASE (2), FOR TMNSMTTTTNG FREQUENCY VOLTAGE TOWARDS THE WrNG CELL (3), A PLURAUTY OF WORKTNG ELECTRODES (7) POSMONED BENEATH THE LMNG CELL (3) ON THE ALUMINIUM NITRIDE (AIN) BASE (2) FOR RECEIVING FREQUENCY VOLTAGE FROM THE LMNG CELL (3), AN IMPEDANCE ANALYZER (8) FOR RECEMNG IMPEDANCE READINGS FROM THE COUNTER ELECTRODE (6) AND WORKING ELECTRODES (7), AND A BACK-ETCHED SIUCON SUBSTMTE (9) COUPLED TO THE ALUMINIUM NTTRIDE (AIN) BASE (2), FOR REDUCTNG C1JRRENT LOS' WHEREIN THE LMNG CErL (3) IS POSmONED rN BETWEEN OF THE INPUT TRANSDUCER AND OUTPUT TRANSDIrcER ON THE ALUMINIUM NITRIDE (AIN) BASE (4).

Item Type:	Patent
Additional Information:	4085/25808
Subjects:	T Technology > TP Chemical technology > TP248.13 Biotechnology T Technology > TP Chemical technology > TP250 Industrial electrochemistry
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Electrical and Computer Engineering
Depositing User:	Dr Maizirwan Mel
Date Deposited:	04 Oct 2012 15:04
Last Modified:	29 May 2013 16:04
URI:	http://irep.iium.edu.my/id/eprint/25808

Actions (login required)

View Item