Focused ion beam micromachining: technology and application

Jaafar, Israd Hakim and Abdul Rahman, Nur Atiqah and Banu, Asfana and Mohammad , Yeakub Ali (2011) Focused ion beam micromachining: technology and application. In: Advanced Machining Process. IIUM Press, Kuala Lumpur, pp. 77-82. ISBN 9789674181628

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Item Type:	Book Chapter
Additional Information:	3967/19415
Uncontrolled Keywords:	Focused ion beam, micromachining, micromilling, FIB
Subjects:	N Fine Arts > NA Architecture
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering
Depositing User:	Sakinah Kamaludin
Date Deposited:	24 Sep 2012 17:09
Last Modified:	24 Sep 2012 17:13
URI:	http://irep.iium.edu.my/id/eprint/19415

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