Thin film of indium tin oxide and its deposition technology deposition

Sutjipto, Agus Geter Edy and Shaha, Sugrib Kumar (2011) Thin film of indium tin oxide and its deposition technology deposition. In: Advances in Materials Engineering - Volume 2. IIUM Press, Kuala Lumpur, pp. 180-185. ISBN 9789674181680

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Item Type:	Book Chapter
Additional Information:	4703/19325
Uncontrolled Keywords:	ITO, magnetron sputtering, diode sputtering, triode sputtering
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering
Depositing User:	Sakinah Kamaludin
Date Deposited:	05 Oct 2012 16:41
Last Modified:	06 Nov 2012 19:55
URI:	http://irep.iium.edu.my/id/eprint/19325

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