Sutjipto, Agus Geter Edy and Mohd Fuad, Nurul Hajar and -, Farah Diana (2011) Electrical property of ITO thin film deposited by Rf Magnetron Sputtering. In: Advances in materials engineering - volume 2. IIUM Press, Kuala Lumpur, pp. 49-54. ISBN 9789674181680
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Official URL: http://rms.research.iium.edu.my/bookstore/default....
Item Type: | Book Chapter |
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Additional Information: | 4703/19092 |
Uncontrolled Keywords: | ITO, thin film deposition, magnetron sputtering |
Subjects: | T Technology > TP Chemical technology |
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): | Kulliyyah of Engineering |
Depositing User: | Sakinah Kamaludin |
Date Deposited: | 03 Oct 2012 15:10 |
Last Modified: | 06 Nov 2012 21:38 |
URI: | http://irep.iium.edu.my/id/eprint/19092 |
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