Mridha, Shahjahan and Shiau, Khee Tang (2011) Measurement of moisture absorption in Borophosphosilicate Glass (BPGS) films. In: Advances in materials engineering. IIUM Press, Kuala Lumpur, pp. 50-57. ISBN 9789674181673
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Official URL: http://rms.research.iium.edu.my/bookstore/default....
| Item Type: | Book Chapter |
|---|---|
| Additional Information: | 3925/19045 |
| Uncontrolled Keywords: | semiconductor, device manufacturing, interlayer dielectric, dopant, glass layer, planarization, reliability |
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology > TN Mining engineering. Metallurgy |
| Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): | Kulliyyah of Engineering |
| Depositing User: | Prof. Dr. Shahjahan Mridha |
| Date Deposited: | 24 Sep 2012 08:08 |
| Last Modified: | 24 Sep 2012 08:08 |
| URI: | http://irep.iium.edu.my/id/eprint/19045 |
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