IIUM Repository

Measurement of moisture absorption in Borophosphosilicate Glass (BPGS) films

Mridha, Shahjahan and Shiau, Khee Tang (2011) Measurement of moisture absorption in Borophosphosilicate Glass (BPGS) films. In: Advances in materials engineering. IIUM Press, Kuala Lumpur, pp. 50-57. ISBN 9789674181673

[img]
Preview
PDF - Published Version
Download (408kB) | Preview
Item Type: Book Chapter
Additional Information: 3925/19045
Uncontrolled Keywords: semiconductor, device manufacturing, interlayer dielectric, dopant, glass layer, planarization, reliability
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TN Mining engineering. Metallurgy
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button): Kulliyyah of Engineering
Depositing User: Prof. Dr. Shahjahan Mridha
Date Deposited: 24 Sep 2012 08:08
Last Modified: 24 Sep 2012 08:08
URI: http://irep.iium.edu.my/id/eprint/19045

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year