Investigation of finish cut of microelectrodischarge milling for nanosurface finish

Ali, Mohammad Yeakub and Mehfuz, R. (2009) Investigation of finish cut of microelectrodischarge milling for nanosurface finish. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 27 (3). pp. 1330-1334. ISSN 1071-1023

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Abstract

In this article, the machining conditions to achieve nanometric surface roughness in finish cut microelectrodischarge milling were investigated. For a constant gap voltage, the effect of feed rate and capacitance was studied on average surface roughness (Ra) and maximum peak-to-valley roughness height (Ry). Statistical models were developed using a three-level, two-factor experimental design. The developed models minimized Ra and Ry by desirability function approach. Maximum desirability was found to be more than 98%. The minimum values of Ra and Ry were 23 and 173 nm, respectively, for 1.00 μm s−1 feed rate and 0.01 nF capacitance. Verification experiments were conducted to check the accuracy of the models, where the responses were found to be very close to the predicted values. Thus, the developed models can be used to generate nanometric level surface finish, which are useful for many applications in microelectromechanical systems.

Item Type:	Article (Journal)
Additional Information:	4751/14898
Uncontrolled Keywords:	capacitance; electrical discharge machining; micromachining; micromechanical devices; milling; nanotechnology; statistical analysis; surface finishing; surface roughness
Subjects:	Q Science > QC Physics T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Manufacturing and Materials Engineering
Depositing User:	Nur' Aini Abu Bakar
Date Deposited:	22 Mar 2012 09:11
Last Modified:	22 Mar 2012 09:11
URI:	http://irep.iium.edu.my/id/eprint/14898

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