A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor

Faris, Waleed Fekry and Mohammed, Hazem (2004) A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor. In: 2004 IEEE International Conference on Semiconductor Electronics, 7-9 December 2004, Kuala Lumpur.

PDF (A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor) - Published Version Restricted to Repository staff only Download (378kB) | Request a copy

Abstract

We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods

Item Type:	Conference or Workshop Item (Full Paper)
Additional Information:	4694/30772
Uncontrolled Keywords:	Engineering uncontrolled terms: Capacitive pressure; International conferences; Semiconductor electronics
Subjects:	T Technology > TJ Mechanical engineering and machinery
Kulliyyahs/Centres/Divisions/Institutes (Can select more than one option. Press CONTROL button):	Kulliyyah of Engineering > Department of Mechanical Engineering
Depositing User:	Prof.Dr. Waleed Fekry Faris
Date Deposited:	19 Sep 2013 16:14
Last Modified:	19 Sep 2013 16:14
URI:	http://irep.iium.edu.my/id/eprint/30772

Actions (login required)

View Item